Microstructured Apparatus With Optical Surface Quality and Method for the Production Thereof

Dipl.-Ing. Anurjew, Dipl.-Ing. Hansjosten, Dr. Brandner

Abstract

Microstructure apparatus comprises a microcavity, a surface of first solid body adjacent to the microcavity with an optical surface quality, and a three-dimensional structure at the microcavity built up on the solid body according to the principle of the rapid prototyping by stereolithographry or by laser melting process. An independent claim is also included for producing a microstructure apparatus with microcavities with an optical surface quality, comprising

1. inserting at least one solid body with an optical surface quality in a bath of a liquid photosensitive monomer,
2. building a three-dimensional structure of the micro-cavities according to the principle of the rapid prototyping by stereolithography from a liquid monomer, where the microcavities are adjacent to the solid body, and
3. cleaning and subsequent heating of the structure,
4. coating an optical surface of the solid body with a layer of particles of at least one metal or alloy, glass, semiconductors and/or ceramics,
5. building a three-dimensional structure of the microcavities according to the principle of the rapid prototyping by selective laser melting process by selective sintering or melting of the structure of the powdered layer, and
6. cleaning and subsequent heating of the structure.